主要特点Mainfeatures前端配有预热炉，可用于蒸发固态源Equippedwithapreheatingfurnaceforevaporatingsolidstatesources加热炉选用滑轨炉，可实现快速升温/降温，缩短实验时间Usesaslidefurnacetoachieverapidheating/coolingandshortentheexperimenttime.法兰端采用卡箍密封，这样就使进料出料更加的方便。Theflangeendissealedbyaclamp,whichmakesthefeedinganddischargingmoreconvenient.进气系统可以按照客户的实验需求配置几路质量流量计，流量计的量程也可以选择不同的配置，真空系统也可以根据客户的需求选择配置各种真空泵。窗体底端Gassupplysystemcanbeconfiguredwithseveralmassflowmetersaccordingtothecustomer'sexperimentalrequirements.Theflowmeter'srangecanalsobeselectedindifferentconfigurati***.Thevacuumsystemcanalsobeconfiguredwithvariousvacuumpumpsaccordingtocustomerrequirements.技术参数TechnicalParametersPreheatingFurnace预热炉Max.Temp400℃温区长度zonelength100mmHeatingfurnace滑轨炉Max.Temp1200℃Power功率2KW(220V)温区长度zonelengthHeating：440mmC***tant：200mmTemperatureController控温方式lPIDautomaticcontrolandauto-tunefunction.模糊PID控制和自整定调节l30programmablesegmentsforprecisethermalprocessing.智能化30段可编程控制lBuilt-inprotectionfortheover-heatedandbrokenthermocouple.超温和断偶报警功能HeatingElements加热元件·Resistancewire,Fe-Cr-AlAlloydopedbyMo电阻丝（掺钼铁铬铝合金）TemperatureAccuracy控温精度+/-1℃Processingtube炉管Size：Φ50*1650mm尺寸：Φ50*1650mmGassupplysystem气路系统连接头类型Connectorstyle双卡套不锈钢接头Doublecuttingferrulestainlesssteelconnector标准量程（N2)Standardrange(N2)50sccm、100sccm、200sccm、500sccm；（可根据用户要求定制）optional准确度Accuracy·&plu***n;1.5%FS响应时间Resp***etimeGascharacteristics：1～4sec气特性Electricalcharacteristics:10sec电特性线性Linearity&plu***n;0.5～1.5%Workingpressuredifferencerange工作压差范围0.1～0.5MPaMax.pressure***大压力·3MPa压力真空表Pressurevacuumgauge－0.1～0.15MPa,0.01MPa/格Vacuumunit真空系统空气相对湿度Relativeairhumidity≤85%抽速pumping10m³/h真空度vacuum10-1Pa容油量Oilcapacity1.1L转速Rotationrate1450rpm噪音Noise50dB)