Tr***elranges25to85mmResolutionto1μmperstepNegligiblebacklashLowpro?lerigidc***tructionLoadcapacityto50kgDirectlystackableforXYZSuitableforusebelow1x10-10mBarBakeableto200°CCross-rollerbearingmotionDiamondcorrectedleadscrewandmatchednutGammaradiationhardto1x106Gyversi******ailableMaybecustomisedSpeci?cationUnitLTXLLTXHTr***elmm25/55/8525/55/85Resolutioninfullstepμm51Max.Speedmm/s154RecommendedloadedspeedinUHVmm/s20.8Repeatabilityμm10.2LoadCapacity(Horizontal)kg5050LoadmomentNm<20<20Axialloadforce@500HzIφ=1Akg310BacklashμmNegligibleNegligibleRoll,Pitch&Yaw(Unloaded)μrad<25<25RollComplianceμrad/Nm55Pitch&YawComplianceμrad/Nm22StraightnessofTr***elμm<1.3μm/100mm<1.3μm/100mmStepperMotorD35.1D35.1VacuummBar1x10-101x10-10Max.Temperature°C200200MTBF(5kgloadand30%dutycycle)hrs15,00010,000)