BROOKS5860E【各项技术参数】5860E:AnalogThermalMassFlowMeter,3-30,000sccm,ElastomerSealsTheBrooksModel5860Eelastomersealedanalogmassflowmeteraccuratelymeasuresgasflowsof3-30,000sccm(Nitrogen).Brooks’extremelystableflowsensorprovidesreliable,repeatableandaccurateflowmeasurementevenundervaryingprocessconditi***.Iteliminatestheneedforcontinuousmonitoringandreadjustmentofgaspressurestoprovideastablegasflow.流量范围：3sccm-30slpm精度：1%FS***大压力：100bar1500psig温度：65℃150F信号：0-5V)