材料Material高纯度Al2O3单晶纯度≥99.996%HighpurityAl2O3singlecrystalpurity≥99.996%晶向OrientationAC直径Di***eter150&plu***n;0.1mm厚度Thickness1000um&plu***n;15μm可定制TTV＜5μmWRAP＜2μmBOW＜5μm***PrimaryFlatLocationA-axis&plu***n;0.2°正面FrontSurface抛光背面Backside腐蚀/抛光表面粗糙度（Ra)SurfaceRoughness＜0.2nm包装Package***无尘室，氮保护气氛。25片盒装CleanRoom,NitrogenAtmosphere.25waferscassette)