上海戈曼机电代理销售日本AYUMI全金属超高真空|真空隔膜阀|电磁真空阀|超高真空闸阀|铝闸阀|真空三通阀|高真空L型阀|高真空蝶阀|日本AYUMI产品主要包括阀超高真空法兰垫片夹具固定,电流导入端子的超高真空各种真空元件同步真空组件,真空设备指南,连接器,无钎剂回流设备/减少的连接器,***仪,真空密封装置,有机质沉积设备,手套箱和气体净化设备,退火装置,液晶注入设备,各种类型的平板,显示器制造设备,真空设备,阀门,（如超高真空和真空金属膜片阀电磁真空阀）,超高真空法兰,垫片,夹具,固定电流导入端子的超高真空,各种真空元件,同步真空组件真空设备该产品包括但不限于晶片和芯片键合机，真空密封系统，一个广泛系列的辉光箱，真空退火系统用于半导体和平板显示器的线条，以及真空部件的大的变化。目前，产品在主流半导体线，微机电系，FPD线，与企业和大学的研发线中的应用。晶圆键合系统芯片到晶圆键合系统***准系统真空密封系统真空气相蒸镀系统手套箱和气体净化系统退火系统晶圆键合系统Ayumioffersaseriesofbondersspreadoverawiderangetosupportfollowingbondingmethods.DirectBondingAdhesiveBondingAnodicBondingGlass-FritBondingSolder/Eutectic/DiffusionBondingThesebonderssupportsR&Dtohighvolumemanufacturingbondtemperaturefromroomtempto900Cbondpressurefromatmto10-6Pabondforceupto80kNwafersizefrom2”to12”ex-situandin-situalignmentalignmentunderultra-highvacuum(10-6Pa)***Customizedtoolwithanyofabovefeaturesareacceptable.****Solder/eutectic/diffusionbondingMetal-metalbondingisanessentialbondingtechniqueforsemiconductor,MEMSandLEDpackaging.Ayumihasextendeditsmasteredandwell-provenultra-highvacuumtechnologytomanufacturethermo-compressionbondingtomeetanycriticalbondrequirementintheindustry.AyumihasaseriesofequipmentfromR&DtoHVMtomeetdifferentprocessrequirementofcustomers.Alltheseequipmentsh***ealigningmoduleandbondingmoduleclusteredtogethersothatthereisnovacuumbreakbetweenaligningandbonding.Thebondingsystemalsocomprisedofforminggastreatmentfacilitytoremovemetaloxideonthesurface.Asthereisnovacuumbreakbetweenforminggastreatmentandbonding,onlypuremetal(nooxide)participateforbonding.Thisassistsinloweringthebondtemperature.ForexampleCu-Cubondingcanberealizedat150C.)