法国AnnealsysMC100MOCVD设备，R&D应用4英寸MOCVD设备应用：在硅基片，玻璃，太阳能电池多晶硅，化合物半导体基片上长金属和合金，过渡金属元素氮化物，碳纳米管，纳米线等膜层应用•Semiconductor:SiO2,HfO2,Ta2O5,Cu,TiN,TaN,…•半导体：:SiO2,HfO2,Ta2O5,Cu,TiN,TaN,…•HighkDielectric:SrTiO3,BaTiO3,Ba(1-x)SrxTiO3(BST)•高K绝缘体:SrTiO3,BaTiO3,Ba(1-x)SrxTiO3(BST)•Ferroelectric:SBT,SBTN,PLZT,PZT,…•铁电物质:SBT,SBTN,PLZT,PZT,…•Superconductor:YBCO,Bi-2223,Bi-2212,Tl-1223,…•超导体：:YBCO,Bi-2223,Bi-2212,Tl-1223,…•Piezoelectric:(Pb,Sr)(Zr,Ti)O3,ModifiedLeadTitanate•压电的:(Pb,Sr)(Zr,Ti)O3,改良钛酸铅•Metals:Pt,Cu,…•金属：:Pt,Cu,…•Carbonnanotubes,nanowires•碳纳米管，纳米线•ColossalMagnetoResistance•大型磁致电阻•Thermalcoatings•热涂层•Bufferlayers•缓冲膜层•Mechanicalcoatings•机械涂层•Optics•光学•Etc…•等等基片类型•Semiconductor:SiO2,HfO2,Ta2O5,Cu,TiN,TaN,…•半导体：:SiO2,HfO2,Ta2O5,Cu,TiN,TaN,…•HighkDielectric:SrTiO3,BaTiO3,Ba(1-x)SrxTiO3(BST)•高K绝缘体:SrTiO3,BaTiO3,Ba(1-x)SrxTiO3(BST)•Ferroelectric:SBT,SBTN,PLZT,PZT,…•铁电物质:SBT,SBTN,PLZT,PZT,…•Superconductor:YBCO,Bi-2223,Bi-2212,Tl-1223,…•超导体：:YBCO,Bi-2223,Bi-2212,Tl-1223,…•Piezoelectric:(Pb,Sr)(Zr,Ti)O3,ModifiedLeadTitanate•压电的:(Pb,Sr)(Zr,Ti)O3,改良钛酸铅•Metals:Pt,Cu,…•金属：:Pt,Cu,…•Carbonnanotubes,nanowires•碳纳米管，纳米线•ColossalMagnetoResistance•大型磁致电阻•Thermalcoatings•热涂层•Bufferlayers•缓冲膜层•Mechanicalcoatings•机械涂层•Optics•光学•Etc…•等等设备特性•Stainlesssteelthermallycontrolledchambertechnology*•不锈钢热控制腔室技术*•Rotatingandheatingsubstrateholderupto850°C•旋转加热基片托，***高至850°C•Substrateholderwithverticalmotion•基片托垂直运动•Upto4precursorsorprecursormixtures•***多4个源或源混合•Vaporizerreactorby-pass•蒸发器反应器支路•ThermocouplecontrolwithPIDtemperaturecontroller•热电偶的控制器通过温度控制器的PID实现•Vacuumandpressurecontrol•真空和压力控制•Purgegaslinewithneedlevalve•配有针阀的吹扫气路•Upto6processgaslineswithdigitalMFC•配有数字MFC，***多6条工艺气路•PCcontrolwithEthernetcommunication•以太网PC控制设备的***优设计•Compatiblewithawiderangeofliquidvaporizers•适用宽范围的液体蒸发器•Upto4precursorliquidlines•***多4个源液体管路•Optimizedorganometallicchemicalliquidlinepanel•***优的有机金属化学液体管路面板•Manualorautomaticprocedureforchemicalcleaningofliquidlines•手动或自动程序化学清洁液体管路•Upto2chemicalreactingcompoundsconnecti***onchamber(H2O,O3…)•***多2个化学反应复合物与腔室连接(H2O,O3…)•Heatedby-passvalveupto300℃•支路阀加热，***高至300℃•Verticallinearmotionmechani***upto100mm•垂直线性运动机能，***高至100mm•GaspanelforCVDapplicati***•CVD应用气体面板)