高可靠性和精度的流量控制器快速的响应时间金属密封.压电控制阀.316L不锈钢材质.5ccm-100slm流量技术规格:ModelSEC-4400SEC-4500SEC-4550SEC-4600StandardFlowRange(N2Eq.)5sccm~8slm10~30slm31~50slm51~100slmWettedMaterialsM(metal)-Type:SUS-316L-R(viton)typeValvePiezoValve(NormalCloseorNormalOpen)FlowControlRange2~100%F.S.Accuracy&plu***n;1%F.S.Resp***e<1.0sec.(500mstypical)Linearity&plu***n;0.5%F.S.Repeatability&plu***n;0.2%F.S.OperatingPressure14~42psi21~42psiLeakIntegrityM-Type:5x10-10Pa·m³/s(He)orlessOperatingTemperature5~50°C(Accuracyguaranteed15~35°C)FlowRateSettingSignal0.1~5VDCFlowRateOutputSignal0~5VDCPowerSupply&plu***n;15VDC&plu***n;5%60mAStandardFitting1/4”VCR,1/4”Swagelok3/8”VCR,3/8”Swagelok)