本公司销售MUSASHINA油泵日本AStandardproductsContents-A1ManipulatorsforVacuum■Made-to-OrderManipulators■3-axisManipulatorsforUltra-HighVacuum●Axisconfiguration1.LinearmovementinZ-axisdirection2.Z-axiscenterrotation3.Chucking■5-axisManipulatorsforUltra-HighVacuum●Axisconfiguration1.LinearmovementinX-axisdirection2.LinearmovementinY-axisdirection3.LinearmovementinZ-axisdirection4.Z-axiscenterrotation5.Flapping■5-axisManipulatorswithLN2Cooling●Axisconfiguration1.LinearmovementinX-axisdirection2.LinearmovementinY-axisdirection3.LinearmovementinZ-axisdirection4.X-axiscenterrotation5.Z-axiscenterrotation■Z-axisStagewith100kgLoadingCapacity●Axisconfiguration1.LinearmovementinZ-axisdirection■TransferRobot-1forUltra-HighVacuum●Axisconfiguration1.Polarcoordinates（rotation,LinearmovementinX-axisdirection）2.LinearmovementinZ-axisdirection■TransferRobot-2forUltra-HighVacuum●Axisconfiguration1.Polarcoordinates（rotation,LinearmovementinX-axisdirection）)