电子束蒸发系统
DESCRIPTIONAngstromCovapIIEvaporatorbasesystem•Ø12"x17"H:6061-T651AluminumHingedLidChamber•SingleUnitFrameEnclosurePowderCoatedw/19"ElectricalRack•Twosetsofstainlesssteeldebrisshields•BasePressurewillbelessthan9x10-7TorrwhentheSystemisClean,DryandEmptyVarian77l/sTurboPumpingPackage•Turbo-V81TurboPumpwithSplinterShield•81-AGMicroprocessorControlledRackmountController•Multi-LineDisplayIncludesPumpStatusandDiagnosticInformation•VarianVacuumPressureMeasurementPackageVarianDS202RotaryVane6.0cfmVacuumPump•DSOilMistEliminator)