产品详细说明•Simpleandcompactdirectdriverotary•Highstiffnesslargediameterballbearing•Precisionglassscaleforpositionalaccuracy•Ceramicservomotorsforhighspeed&resolution•Vacuumcompatibleversi******ailableC***tructionFeatures:DirectDrive:(2)or(4)HR2CeramicServoMotors(2)HR2motorsprovide.34Nmtorque(4)HR2motorsprovide.68NmtorqueEncoder:RotaryGlassScalewith20µmgratingpitchStandardResolutionof327,680ppr(19.17µrad)OptionalResolution2,097,152ppr(3µrad)Bearing:6075Ndynamicloadrating(Stagespecsbasedonmaxloadratingof22kgPerformanceSpecificati***:MaximumVelocity:80RPMEncoderResolution:19.17µradEncoderAccuracy:40µrad(8.25arcseconds)PositionRepeatability:&plu***n;40µrad(&plu***n;8.2arcseconds)MaximumLoad:22kgMaximumTorque.68NmRadialBearingRun-out5µm)