产品详细说明技术参数MP84-25-LM50-LM100-LM行程[mm]2550100精度[µm]333重现性[µm]<0,3<0,3<0,3直线度/平面度（全行程）[µm]0,512***大速度[mm/s]250250250***大加速度[m/s2]>10>10>10***大推力(HR4-motor)[N]151515重量[kg]0,60,751,0PiezoLinearMotor:HR4静态推力5N增量式直线光栅尺:分辨率5nmLiftLimitation:2fixedstops三轴XYZ紧凑设计可选真空无磁下应用的规格Bearing:backlash-freepreloadedcrossrollerbearingsCasing:warp-proof,anodizedblackaluminumalloy)