主要特点该款设备是全自动Pla***a增强CVD系统(PECVD)，连续可控温度以及Pla***a强度等，配备真空系统，可以低压条件下实现工艺，PECVD系统能使整个实验腔体都处于辉光产生区，辉光相对均匀等效，很好的解决了传统等离子工作不稳定状态，该设备炉管可360°旋转，有助于粉料的烧结更均匀，可大角度倾斜，方便进出料，倾斜角度在0-35°之间，所有物料经过的管道都选用非金属材质，如：进出料腔体选用石英材质，推料杆选用石英及聚四氟材质。ThedeviceisafullyautomatedPla***aEnhancedCVDSystem(PECVD)withcontinuoustemperaturecontrolandPla***astrength.Equippedwithavacuumsystemthatcanbeusedunderlowpressureconditi***.ThePECVDsystemenablestheentireexperimentalchambertobeintheglowgenerationarea.Thelightisuniformandequivalent,whichsolvestheunstableoperationofthetraditionalpla***a.Thetubeofthedevicecanrotate360°,whichhelpsthesinteringofthepowdertobemoreuniform,canbeinclinedatalargeangle,andisconvenientforfeedinganddischarging.TheinclinationangleisBetween0-35°,allpipelinematerialspassingthrougharemadeofnon-metallicmaterials.Forexample,theinletandoutletchambersaremadeofquartz,andthepushrodsaremadeofquartzandPTFE.技术参数加热系统Heatingsystem功率Power4KW电压VoltageAC220V50/60Hz***高温度Max.Temp1200°C使用温度Workingtemp1100°C加热长度Heatingzonelength200mm+200mm恒温长度C***tantzonelength250mm控温方式TemperatureControllerPIDautomaticcontrolandauto-tunefunction.模糊PID控制和自整定调节30programmablesegmentsforprecisethermalprocessing.智能化30段可编程控制Built-inprotectionfortheover-heatedandbrokenthermocouple.超温和断偶报警功能Operationinterfaceis10"LCDtouchscreencontrol操作界面为10"液晶触摸屏控制控温精度TemperatureAccuracy+/-1℃炉管尺寸TubeSizeSize：Φ60*420+Φ100*360+Φ60*420mm尺寸：Φ60*420+Φ100*360+Φ60*420mmFurnacetuberotationrate：0~60r/min炉管转速：0~60r/minFurnacebodyinclinationangle0~35°（adjustable）Pla***a系统Pla***asystem本系统借助于辉光放电产生等离子体，辉光放电等离子体中，电子密度高，通过反应气态放电，有效利用了非平衡等离子体的反应特征，从根本上改变了反应体系的能量供给方式。Thesystemgeneratespla***abymeansofglowdischarge.Intheglowdischargepla***a,theelectrondensityishigh,andthereactioncharacteristicsofthenon-equilibriumpla***aareeffectivelyutilizedbythereactiongasdischarge,whichfundamentallychangestheenergysupplymodeofthereactionsystem.进料系统Feedingsystem送料系统速度连续可调，停止送料且炉体倾斜***大时，物料不会从送料系统外漏，送料系统方便拆卸，拆卸后可手动加料，设备可正常运行。Thespeediscontinuouslyadjustable.Whenthefeedingisstoppedandthefurnacebodyistiltedtothemaximum,thematerialwillnotleak.Thefeedingsystemiseasytodisassemble,andthematerialcanbemanuallyfedafterdisassembly,andtheequipmentcanoperatenormally.出料系统Dischargesystem出料系统在炉体倾斜出料时可自动出料。）Thedischargingsystemcanautomaticallydischargewhenthefurnacebodyisinclinedanddischarged.气体控制系统Gascontrolsystem该控气系统是可以控制两种气体按照不同流量进行混合配比的，也可以***控制，质量流量计安装于密封的可移动的机柜内，由超洁双抛不锈钢管与精密双卡套接头连接组成。Thegascontrolsystemcancontrolthemixingratioofthetwogasesaccordingtodifferentflowrates,andcanalsobeindependentlycontrolled.Themassflowmeterisinstalledinasealedmovablecabinet,whichiscomposedofsupercleanstainlesssteeltubeandtheprecisiondoubleferrulejoint.低真空系统Lowvacuumsystem该系统配备真空机械泵，可以抽真空，可以让设备在真空环境下进行反应。Equippedwithavacuummechanicalpumpthatcanbevacuumedtoallowtheunittoreactinavacuumenvironment.气料分离系统Separationsystem该系统可以让设备在充气体保护或者抽真空时，实现气体与物料的分离。thesystemallowstheseparationofgasandmaterialduringtheprotectionoftheinflatororwhenvacuuming.过滤系统filteringsystem该系统可防止物料进入真空泵，保证真空泵的正常运行。Thesystempreventsmaterialfromenteringthevacuumpumpandensuresproperoperationofthevacuumpump.炉管转动系统Furnacetuberotationsystem炉管转动系统可以让炉管360°匀速转动，转速在0-60r/min连续可调，且能在60r/min转速下长时间运行。Allowsthetubetorotate360°atac***tantspeed.Therotationspeediscontinuouslyadjustablefrom0to60r/minforalongtime.)